Ring groove chuck (groove chuck) is a commonly used industrial chuck in the semiconductor industry, with high temperature resistance, corrosion resistance, wear resistance and other characteristics. Usually made of silicon carbide or alumina ceramic materials. It is widely used in semiconductor production equipment to absorb, fix, transfer and handle silicon wafers, wafer and various workpieces and materials.
| Fountyl Technologies Pte. Ltd. | |
|---|---|
| Product Category | Chucks |
| Product Name | Ring Groove Ceramic Chuck |
| Chuck Type | Electrostatic; Wafer Chuck |