The Hot Oxidation System (HOx) offers a significant advance in the performance of non-fuel oxidation technology. Targeted at CVD applications, the system ensures safe removal of pyrophoric gases to below flammable limits and the effective treatment of acidic by-products to prevent exhaust duct corrosion.
The HOx combines an innovative electrical heated oxidation unit with the proven three-stage wet scrubber from the inward-fired combustor product range to deliver excellent powder handling capabilities.
| Edwards Vacuum | |
|---|---|
| Product Category | Thermal Oxidizers and Catalytic Oxidizers |
| Product Number | HOx |
| Product Name | Hot Oxidation System |
| Applications | PECVD TEOS, BPSG, Oxide, Nitride, Tungsten CVD, LPCVD |
