ETEL S.A. ZT Combined Module

ASME-NNNN-03-0012-00 04xx-ZT combined module The ZT box is a module combining two degrees of freedom, in Z and Theta, within one single unit. Two actuations are possible along the Z direction, a coarse one and a fine one. This module can be used in a standalone mode or mounted on top of an XY platform. This module is especially well suited for wafer process control applications such as thin film metrology, critical dimensions, etc. Characteristics Infinite rotation Built-in vacuum supply at wafer chuck level Built-in gravity compensator ISO1 clean room compatible thanks to vacuum suction Coarse Z axis with 12 mm stroke for wafer loading/unloading and fine Z with 4 mm stroke for focus adjustment Version without a coarse Z can be done Very good Z jitter as well as move and settle Main features Bidirectional repeatability: ±0.3 µm for Z and ±2 arcsec for T Position accuracy: ±0.6 µm for Z and ±3 arcsec for T Speed up to: 0.1 m/s for Z and 15.7 rad/s for T Acceleration up to: 0.2 g for Z and 104.7 rad/s² for T Position stability: ±5 nm for Z and ±0.2 arcsec for T Load capacity: 1 kg