The PFLOW5001 is an OEM thermal mass flow controller using MEMS sensor technology for gas flow monitoring and control, with a full-scale range from 0.05 to 20 SLPM. It features a 9-pin JST-SM09B-SRSS-TB or 8-pin Micromatch connector, depending on the interface choice, and operates on 8 to 24 Vdc. Analog output is 0 to 5 Vdc, linearized to the selected flow range. It supports RS232, RS485, and I2C communication, with auto-gas recognition for pre-programmed gases. The device operates at up to 1.0 MPa pressure and a temperature range of -5 to 50°C, with a turn-down ratio of up to 1000:1 and setting time under 150 ms. Wetted materials include aluminum alloy 6063, silicon nitride, Ablestik 84-3J, and FR4. It complies with RoHS and REACH and meets CE IEC 61000-4-2 and IEC 61000-4-8.
MEMS mass flow sensors for manifold configuration
Similar to MFM / MFC 2000 Series; MFM 2020, MFM 2021, MFM 2100, MFC 2022, MFC 2100, MDM2022 etc.
MFM2000, MFC2000, MFM2020, MFM2021, MFM2100, MFC2022, MFC2100, MDM2022
Additionally, it is compatible to Axetris Flow Sensor.
| Angst+Pfister Sensors and Power | |
|---|---|
| Product Category | Flow Meters |
| Product Number | PFLOW5001 |
| Product Name | Flow sensors & Level sensors - Flow sensors thermal |
| Meter Type | Mass Flow Meter |
