Design Features
Travels to 120 μm x 120 μm
50 x 50 mm square clear aperture
Superior multi-axis accuracy via parallel-kinematic design
High-stiffness and dynamics resulting in high process throughput
High-precision, frictionless flexure guidance
Patent-pending design provides unmatched geometric performance
Long device lifetime
Superior positioning resolution and linearity with direct-metrology capacitive sensor option
Open-loop and vacuum versions
Aerotech’s QNP2 series XY, parallel-kinematic, piezo positioning stages combine sub-nanometer resolution, high dynamics, and excellent geometric performance in a compact, low-profile package. The QNP2-100-XYA piezo stages come standard with a 50 mm x 50 mm clear aperture with closed-loop travels up to 100 µm x 100 µm (open-loop travels to 120 µm x 120 µm). The design is ideal for optical microscopy, scanning probe microscopy, x-ray transmission microscopy, or other inspection or manufacturing applications where two-sided part access is required.
Precision Parallel-Kinematic Design
The QNP2 piezo stages employ a parallel-kinematic flexure and metrology design that ensures the highest levels of multi-axis accuracy. Guided by precision flexures which are FEA-optimized to ensure high-stiffness and long device life, the QNP2 stages offer best-in-class stiffness and resonant frequency enabling high process throughput and fast closed-loop response.
Using a patent-pending drive design, yaw errors are minimized while still maintaining an Abbe-compliant metrology system. This design results in unmatched positioning performance over the entire XY travel space.
Sub-Nanometer Performance
All QNP2 piezo stages are available with closed-loop feedback (-C) or open-loop (no feedback). The unique capacitive sensor parallel-metrology design measures the output of the positioning carriage directly enabling sub-nanometer resolution, linearity errors below 0.01%, and single-digit nanometer repeatability.
Ultra-Precision Control
When coupled with Aerotech’s Q-series controllers and drives, the QNP2 stages demonstrate sub-nanometer positioning resolution, in-position stability (jitter), and high-positioning bandwidth. Software options such as Aerotech’s Dynamic Controls Toolbox and Motion Designer packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. OEM drive options are also available. Aerotech’s controller architecture easily enables high-speed, tightly-controlled coordinated motion between piezo stages, servos, steppers, and galvos.
Design Features
- Travels to 120 μm x 120 μm
- 50 x 50 mm square clear aperture
- Superior multi-axis accuracy via parallel-kinematic design
- High-stiffness and dynamics resulting in high process throughput
- High-precision, frictionless flexure guidance
- Patent-pending design provides unmatched geometric performance
- Long device lifetime
- Superior positioning resolution and linearity with direct-metrology capacitive sensor option
- Open-loop and vacuum versions
Aerotech’s QNP2 series XY, parallel-kinematic, piezo positioning stages combine sub-nanometer resolution, high dynamics, and excellent geometric performance in a compact, low-profile package. The QNP2-100-XYA piezo stages come standard with a 50 mm x 50 mm clear aperture with closed-loop travels up to 100 µm x 100 µm (open-loop travels to 120 µm x 120 µm). The design is ideal for optical microscopy, scanning probe microscopy, x-ray transmission microscopy, or other inspection or manufacturing applications where two-sided part access is required.
Precision Parallel-Kinematic Design
The QNP2 piezo stages employ a parallel-kinematic flexure and metrology design that ensures the highest levels of multi-axis accuracy. Guided by precision flexures which are FEA-optimized to ensure high-stiffness and long device life, the QNP2 stages offer best-in-class stiffness and resonant frequency enabling high process throughput and fast closed-loop response.
Using a patent-pending drive design, yaw errors are minimized while still maintaining an Abbe-compliant metrology system. This design results in unmatched positioning performance over the entire XY travel space.
Sub-Nanometer Performance
All QNP2 piezo stages are available with closed-loop feedback (-C) or open-loop (no feedback). The unique capacitive sensor parallel-metrology design measures the output of the positioning carriage directly enabling sub-nanometer resolution, linearity errors below 0.01%, and single-digit nanometer repeatability.
Ultra-Precision Control
When coupled with Aerotech’s Q-series controllers and drives, the QNP2 stages demonstrate sub-nanometer positioning resolution, in-position stability (jitter), and high-positioning bandwidth. Software options such as Aerotech’s Dynamic Controls Toolbox and Motion Designer packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. OEM drive options are also available. Aerotech’s controller architecture easily enables high-speed, tightly-controlled coordinated motion between piezo stages, servos, steppers, and galvos.
