Litmas is an all-in-one remote plasma source combining the power supply, LitmasMatch™ matching network, and plasma chamber into one compact chassis.
Small-footprint point-of-use abatement solution
Highly reliable, effective abatement with minimum utilities usage
Lower cost of ownership than competitive solutions
The Litmas® Remote Plasma Source (RPS) system delivers high concentrations of reactive gas species to enable advanced fluorinated gas abatement. Its small-footprint, high-performance, ease-of-use, and low-cost-of-ownershi
p solutions make it a wise choice for new installations or retrofitting existing systems for abatement.
Benefits
Generates high reactive specie fluxes, delivering higher destruction efficiency
Etch gas abatement solution that meets regulatory or green initiative goals
Increases pump lifetime by reducing particulates from deposition processes
Provides fast matching, stable power delivery for precise process control
Comprises one small-footprint package, easy to install in existing or new production locations
Features
Eliminates greenhouse gas emissions
Provides the highest available plasma power density
Uses durable SiO2 or Al2O3 chamber materials
Uses patented LitmasMatch™ solid-state power-delivery topology
Integrates the power supply, match, and plasma chamber in one package
Litmas is an all-in-one remote plasma source combining the power supply, LitmasMatch™ matching network, and plasma chamber into one compact chassis.
- Small-footprint point-of-use abatement solution
- Highly reliable, effective abatement with minimum utilities usage
- Lower cost of ownership than competitive solutions
The Litmas® Remote Plasma Source (RPS) system delivers high concentrations of reactive gas species to enable advanced fluorinated gas abatement. Its small-footprint, high-performance, ease-of-use, and low-cost-of-ownership solutions make it a wise choice for new installations or retrofitting existing systems for abatement.
Benefits
- Generates high reactive specie fluxes, delivering higher destruction efficiency
- Etch gas abatement solution that meets regulatory or green initiative goals
- Increases pump lifetime by reducing particulates from deposition processes
- Provides fast matching, stable power delivery for precise process control
- Comprises one small-footprint package, easy to install in existing or new production locations
Features
- Eliminates greenhouse gas emissions
- Provides the highest available plasma power density
- Uses durable SiO2 or Al2O3 chamber materials
- Uses patented LitmasMatch™ solid-state power-delivery topology
- Integrates the power supply, match, and plasma chamber in one package
