Compact, lightweight, and air-cooled, HiLight™ RF generators are ideal for low-power, on-board applications, suiting 13.56 MHz plasma and 1 or 2 MHz processes.
Economical
Flexible, single-phase input
Compact design
Designed for use with 230 VAC, single-phase input power, the HiLight™ generators provide up to 600 W into a 50 Ω, non-reactive load. HiLight RF generators provide accurate power regulation and incorporate internal protection limits that enable safe and reliable operation. The RF generators are compact and lightweight, permitting you to mount directly on the tool or chamber. HiLight generators are controlled via a 25-pin analog user port.
Benefits
Easily install in non-19" rack mounts
Increase accuracy and reliability with wave or pulsing modes
Features
Compact, lightweight shoebox design
Air cooling
Wave and pulse mode
Phase synchronization (CEX) and pulsing
Analog user port
Compact, lightweight, and air-cooled, HiLight™ RF generators are ideal for low-power, on-board applications, suiting 13.56 MHz plasma and 1 or 2 MHz processes.
- Economical
- Flexible, single-phase input
- Compact design
Designed for use with 230 VAC, single-phase input power, the HiLight™ generators provide up to 600 W into a 50 Ω, non-reactive load. HiLight RF generators provide accurate power regulation and incorporate internal protection limits that enable safe and reliable operation. The RF generators are compact and lightweight, permitting you to mount directly on the tool or chamber. HiLight generators are controlled via a 25-pin analog user port.
Benefits
- Easily install in non-19" rack mounts
- Increase accuracy and reliability with wave or pulsing modes
Features
- Compact, lightweight shoebox design
- Air cooling
- Wave and pulse mode
- Phase synchronization (CEX) and pulsing
- Analog user port
