The PAS 5500/850D 248-nm Step-and-Scan system enables 110-nm mass production. Since the initial introduction of the PAS 5500/850, the PAS 5500/850 series have become the worldwide standard for both 110-nm logic and 110-nm memory applications.
The PAS 5500/850D can be configured with a number of options that enable ultra low-k1 in manufacturing, extending application of the PAS 5500/850D well below 110 nm.
| ASML Optics | |
|---|---|
| Product Category | Lithography Equipment |
| Product Number | PAS 5500/850D |
| Product Name | Lithography System |
