The PAS 5500/350C is a Deep UV stepper for 0.15-μm applications and beyond. The high productivity and low cost of ownership allow capacity extensions in existing DUV stepper fabs as well. The PAS 5500/350C system provides a very cost-effective mix-and-match lithography solution when used in conjunction with other ASML PAS 5500 i-line and DUV steppers.
| ASML Optics | |
|---|---|
| Product Category | Lithography Equipment |
| Product Number | PAS 5500/350C |
| Product Name | Lithography System |
