The pas 5500/100D i-line stepper is designed for mass production at 0.4μm and achieves extremely high throughput while maintaining the utmost versatility with its variable Numerical Aperture (NA). This stepper extends i-line’s capability for manufacturing multiple generations of sub-halfmicron design rules by optimising both depth of focus and resolution for critical process layers.
| ASML Optics | |
|---|---|
| Product Category | Lithography Equipment |
| Product Number | PAS 5500/100D |
| Product Name | Lithography System |
