Phenom-World BV Datasheets for Semiconductor Metrology Instruments

Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers, optical systems, profilometers, reflectometers, resistance probes, RHEED systems, and X-ray diffractometers.  
Semiconductor Metrology Instruments: Learn more

Product Name Notes
The Phenom Pro desktop SEM is one of the most advanced imaging models in the Phenom series. With its long-life high-brightness CeB6 electron source, the Phenom Pro creates state-of-the-art images...
The Phenom ProX desktop scanning electron microscope is the ultimate all-in-one imaging and X-ray analysis system. With the Phenom ProX desktop SEM, sample structures can be physically examined and their...
The Phenom Pure desktop SEM (scanning electron microscope) is an ideal tool for making the transition from working with a light microscope to operating an electron microscope. The Phenom Pure...