JEOL USA, Inc. Datasheets for Wafer and Thin Film Instrumentation
Instruments such as quartz crystal microbalance (QCM) monitors, ellipsometers, RHEED systems, imaging stations, CD-SEMs, ion mills, C-V systems specifically designed for wafer metrology or in-situ monitoring of thin film parameters during thin film or semiconductors wafer processing.
Wafer and Thin Film Instrumentation: Learn more
| Product Name | Notes |
|---|---|
| DART™ (Direct Analysis in Real Time) is a new ion source that can analyze samples with various states and shapes without any sample preparation. | |
| The EC-52000IC Ion Cleaner is a device that holdsa specimen of an electron microscope underglow discharge, for removing hydrocarboncontamina nts adhered to the specimen byutilizing physical and chemical reactions.The Ion... |