Vacuum Pumps and Vacuum Generators from Edwards Vacuum

iGX Dry Pump -- iGX100L

iGX Dry Pump -- iGX100L -- View Larger Image
iGX Dry Pump -- iGX100L-Image

Specifications

Product Category
Vacuum Pumps and Vacuum Generators
Vacuum Pump Type
Mechanical
Configuration
Individual Vacuum Pump
Application
Semiconductor
Pumping Speed
61.74 CFM (105 m³/hr)
Ultimate Vacuum
 
Mounting
 
Lubrication Style
 
Power Source