MF5000 series mass flow meters are specially designed for small pipe flow monitor and control. This series can measure gas flow in a pipe diameter as small as 0.5 mm, but not over 19 mm. Thanks to the self-flow conditioning feature of the MEMS sensors, the meters features an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in this application scope. The accuracy of the meters are generally (1.5+0.2FS%) or better depending on the requests. The meters can work at an environment of -20 to 60°C and pressure up to 2.5 MPa. Applications include semiconductor gas process monitor and control, hospital oxygen gas monitor, etc.
Siargo Ltd. | |
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Product Category | Flow Meters |
Product Number | MF5019 |
Product Name | MF-5000 Series Gas Flow Meter |
Meter Technology | MEMS Flow Sensor |
Meter Type | Mass Flow Meter |
Operating Temperature | -4 to 149 F (-20 to 65 C) |
Pipe Diameter | 0.75 inch (19 mm) |
Mounting | In-line |