Lithography Equipment from TSI Incorporated

Deposition Calibration Standards

 
 
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Deposition Calibration Standards-Image

High-quality surface defect calibration standards improve overall performance of your inspection systems and reduce inconsistencies within your inspection tool fleet. MSP's calibration standards are leaders in the industry for consistent and repeatable particle size and count control.MSP provides certified Wafer and Photomask (Reticle) Calibration Standards for calibrating, qualifying, and monitoring wafer and photomask inspection systems. Particles of specified size, composition, and count are deposited on your substrate of choice, including wafers, 6-inch photomasks (any type), or HDD disks. Particles can be deposited on bare, film, and patterned wafers from 100mm to 450mm.


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