The VC Series is able to rapidly vaporize pure water or other liquid sources without carrier gas, which enables you to construct a more compact vaporization system.
HORIBA can provide you with a custom-made vaporization system consisting of this VC Series and all the other components you need:
- A liquid mass flow meter for flow rate measurement,
- A high temperature mass flow controller for measurement of vapor flow rate,
- Valves, filters, heaters, etc.
- Compact size
- Can be installed in a variety of positions
- Best-selling TEOS vaporization system models
- Combines SEF or LF, and digital control is possible
- No need for a special bubbling tank or vaporization tank
- Line-up of DeviceNetTM model
- RoHS Compliance.