Vaporizers from HORIBA Instruments, Inc.

Direct Liquid Injection System -- VC Series

Direct Liquid Injection System -- VC Series -- View Larger Image
Direct Liquid Injection System -- VC Series-Image

The VC Series is able to rapidly vaporize pure water or other liquid sources without carrier gas, which enables you to construct a more compact vaporization system.

HORIBA can provide you with a custom-made vaporization system consisting of this VC Series and all the other components you need:

  • A liquid mass flow meter for flow rate measurement,
  • A high temperature mass flow controller for measurement of vapor flow rate,
  • Valves, filters, heaters, etc.
  • Compact size
  • Can be installed in a variety of positions
  • Best-selling TEOS vaporization system models
  • Combines SEF or LF, and digital control is possible
  • No need for a special bubbling tank or vaporization tank
  • Line-up of DeviceNetTM model
  • RoHS Compliance.