HORIBA's best-selling baking system has been developed to meet the requirements of today’s high technology industries. Without the need of a carrier gas, the system can provide stable vaporization of materials such as TEOS (at a rate of 600 SCCM) and H2O (at a rate of 2 SLM). For ease of access all device maintenance can be performed from the front of the unit.
- High Flow Rate Gasification
- The LSC-A100 provides stable gasification of materials such as TEOS 600SCCM and H2O 2SLM
- All device maintenance can be performed at the front of the unit
- An optional PocketPC type PDA can be used to monitor the operating conditions of the LSC and to record and analyze operation logs.