Vaporizers from HORIBA Instruments, Inc.

Compact Baking System -- LSC Series

 
 
Compact Baking System -- LSC Series -- View Larger Image
Compact Baking System -- LSC Series-Image

HORIBA's best-selling baking system has been developed to meet the requirements of today’s high technology industries. Without the need of a carrier gas, the system can provide stable vaporization of materials such as TEOS (at a rate of 600 SCCM) and H2O (at a rate of 2 SLM). For ease of access all device maintenance can be performed from the front of the unit.

  • High Flow Rate Gasification
  • The LSC-A100 provides stable gasification of materials such as TEOS 600SCCM and H2O 2SLM
  • All device maintenance can be performed at the front of the unit
  • An optional PocketPC type PDA can be used to monitor the operating conditions of the LSC and to record and analyze operation logs.