A clean room applicable model of the SCARA robot. The Z-axis spline is covered by bellows made of less dust emission materials and other sliding parts are completely sealed. Harnesses are also completely built-in and the inside of the robot is sucked from the rear of the base to prevent dust emission.
Degree of cleanliness : Class 10 (0.1μm) equivalent to FED-STD-209D （CLASS ISO3 ISO14644-1）
*Per 1cf (0.1μm base),when suction blower is used.