HD Series Pumps
World Class CoO for Harsh Applications
HD Series Pumps are application proven pumps providing world class energy efficiency, low CoO, and excellent reliability. HD series are a good selection for PECVD and LPCD applications involving corrosive, condensable and particulate by-products. They are very compact, quiet and have state-of-the-art network, control and feedback capabilities.
| SynSysCo | |
|---|---|
| Product Category | Vacuum Pumps and Vacuum Generators |
| Product Number | HD600 |
| Product Name | HD Series Hybrid Dual-Helical Dry Pump |
| Vacuum Pump Type | Mechanical |
| Configuration | Individual Vacuum Pump |
| Application | Industrial; Semiconductor; CVD, PVD, Etch, High Particulate, High Water Vapor Vacuum Ovens, Heat Treating, Lamination |
| Pumping Speed | 294 CFM (500 m³/hr) |
| Ultimate Vacuum | 5.00E-4 torr (29.9 in Hg vac) |
