SPIE - Education Optical Scatter Metrology for Industry SC1003

The course emphasizes quantifying, measuring and understanding scatter. A scatterometer will be used during the class to illustrate these issues and students are encouraged to bring samples to the course. Optical scatter, originally used almost exclusively to characterize the stray light generated by optically smooth surfaces, is now being used as a fast, economical way to monitor the surface texture requirements in a variety of industries. For example, as the lighting industry moves to LED’s scatter from a huge number of components is being measured for analysis in stray radiation codes. Texture is an important requirement for the metal producing industry and it changes with roll wear. The appearance of every day appliances (from door hinges to computer cases) varies dramatically with texture. The quality of flat panel displays depends on the scatter characteristics of the screen and components behind it. SEMI and ASTM have responded to the new applications with "scatter standards" to help communication between manufacturers, vendors and customers. The course starts with easier to analyze optical applications and then explores the transition to rougher industry surfaces, where the measurements are easier. Between a good optical mirror and a concrete sidewalk there are thousands of industry surfaces that can be monitored with scatter metrology. There are two key points for these "in-between" surfaces: (1) If the texture changes - the scatter changes and (2) these changes (and product function) cannot be adequately monitored by a single variable - such as RMS Roughness, Haze or Gloss. Students are asked to share as much as they can of their scatter metrology issues.