Optical lithography for integrated circuits is undergoing a renaissance with the adoption of resolution enhancement techniques (RET). Some RET concepts have become routine in manufacturing, almost two decades after the original applications were conceived. This volume gathers together seminal RET papers. Since many of the first applications were announced by Japanese authors well before the material was presented in English, some of the original Japanese papers are included plus their English translations.
| SPIE | |
|---|---|
| Product Category | Technical Books |
| Product Number | ISBN: 9781628413656 |
| Product Name | Selected Papers on Resolution Enhancement Techniques in Optical Lithography |
