Proceedings of SPIE Volume 8977
Editor(s): Wibool Piyawattanametha ; Yong-Hwa Park
Date Published: 26 March 2014
| SPIE | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | ISBN: 9780819498908 |
| Product Name | MOEMS and Miniaturized Systems XIII |