The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
| SPIE | |
|---|---|
| Product Category | Technical Books |
| Product Number | ISBN: 9780819497864 |
| Product Name | Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography |
