Proceedings of SPIE Volume 8252
Editor(s): Harald Schenk ; Wibool Piyawattanametha ; Wilfried Noell
Date Published: 16 March 2012
| SPIE | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | ISBN: 9780819488954 |
| Product Name | MOEMS and Miniaturized Systems XI |