Proceedings of SPIE Volume 8133
Editor(s): Kevin G. Harding ; Peisen S. Huang ; Toru Yoshizawa
Date Published: 29 August 2011
| SPIE | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | ISBN: 9780819487438 |
| Product Name | Dimensional Optical Metrology and Inspection for Practical Applications |