Proceedings of SPIE Volume 7928
Editor(s): Sonia Garcia-Blanco ; Rajeshuni Ramesham
Date Published: 11 February 2011
| SPIE | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | ISBN: 9780819484659 |
| Product Name | Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X |