Proceedings of SPIE Volume 7926
Editor(s): Mary Ann Maher ; Jung-Chih Chiao ; Paul J. Resnick
Date Published: 10 February 2011
| SPIE | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | ISBN: 9780819484635 |
| Product Name | Micromachining and Microfabrication Process Technology XVI |
