Proceedings of SPIE Volume 6885
Editor(s): Srinivas A. Tadigadapa ; Babak A. Parviz ; Albert K. Henning
Date Published: 22 February 2008
| SPIE | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | ISBN: 9780819470607 |
| Product Name | MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface |