Proceedings of SPIE Volume 6648
Editor(s): Michael T. Postek ; John A. Allgair
Date Published: 10 September 2007
| SPIE | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | ISBN: 9780819467966 |
| Product Name | Instrumentation, Metrology, and Standards for Nanomanufacturing |