Proceedings of SPIE Volume 6463
Editor(s): Allyson L. Hartzell ; Rajeshuni Ramesham
Date Published: 20 January 2007
| SPIE | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | ISBN: 9780819465764 |
| Product Name | Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI |