Proceedings of SPIE Volume 6415
Editor(s): Jung-Chih Chiao ; Andrew S. Dzurak ; Chennupati Jagadish ; David Victor Thiel
Date Published: 18 January 2007
| SPIE | |
|---|---|
| Product Category | Standards and Technical Documents |
| Product Number | ISBN: 9780819465238 |
| Product Name | Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III |