This handbook contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Eleven chapters cover key aspects of micromachining and microfabrication, including numerous device applications.
| SPIE | |
|---|---|
| Product Category | Technical Books |
| Product Number | ISBN: 9780819423795 |
| Product Name | Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication |
