Saint-Gobain Performance Ceramics & Refractories Silicon Carbide Semiconductor Ceramic Fixturing Material Hexoloy® SA

Hexoloy® SA sintered silicon carbide provides outstanding shape and thermal properties for the production of semiconductor components. Hexoloy® SA sintered silicon carbide is used in the production of components for semiconductor wafer processing such as vacuum chucks, chemical mechanical polishing (CMP) blocks and susceptors. Its thermal expansion match to silicon, high elastic modulus, chemical inertness ensures the economic benefits of maintenance and reuse, and high thermal conductivity for even, rapid heating of the silicon wafer. Hexoloy® SA silicon carbide is produced by sintering submicron silicon carbide powder. The sintering process results in a self-bonded, fine grain (less than 10μm) SiC product that is extremely hard, lightweight and low in porosity. Outstanding shapeability and resistance to corrosion, erosion, high temperature and thermal shock are other key benefits.