Kionix, Inc. KXPS5 Series KXPS5-4457


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KXPS5 Series - KXPS5-4457 - Kionix, Inc.
Ithaca, NY, USA
KXPS5 Series KXPS5-4457
These high-performance silicon micromachined linear accelerometersand inclinometers consist of a sensor element and an ASIC packaged in a3x5x0.9mm Land Grid Array (LGA). The sensor element is fabricated fromsingle-crystal silicon with proprietary Deep Reactive Ion Etching(DRIE) processes and is protected from the environment by ahermetically-sealed silicon cap at the wafer level. TheKXPS5 series is designed to provide a high signal-to-noise ratio withexcellent performance over temperature. These sensors can accept supplyvoltages between 1.8V and 5.25V. Sensitivity is factory programmableallowing customization for applications requiring from ±1.5g to ±6.0granges. Sensor bandwidth is user-definable. Interrupts can be generatedfor acceleration on any axis above a threshold value (Motion Interrupt)or for acceleration on all three axes below a threshold value(Free-fall Interrupt). The sensor element functions onthe principle of differential capacitance. Acceleration causesdisplacement of a silicon structure resulting in a change incapacitance. An ASIC, using a standard CMOS manufacturing process,detects and transforms changes in capacitance into an analog outputvoltage, which is proportional to acceleration. This voltage isdigitized by an on-board A/D converter and is accessed via aninter-integrated circuit (I2C) bus or serial peripheral interface (SPI).
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Technical Specifications

  Kionix, Inc.
Product Category Accelerometers
Product Number KXPS5-4457
Product Name KXPS5 Series
Frequency Range 1000 Hz
Sensor Technology MEMS
Sensor Outputs Acceleration
Operating Temperature -4 to 158 F (-20 to 70 C)
Device Category Sensor / Transducer
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