These piezo-driven, flexure-guided Z-stages are completely frictionless and provide very fast response in the millisecond range. Capacitive feedback provides high resolution and nanometer repeatability. PIHera stages can be combined with long-travel motorized stages or with other PIHera piezo flexure X and XY stages.
Z-Axis Travel to 400 Micron
Low Profile
Resolution <1 Nanometer
Frictionless Precision Flexure Guiding System
PICMA® High-Performance Multilayer Piezo Drives
Direct Metrology with Capacitive Sensors for Highest Precision
0.02% Position Accuracy
X, XY, Z, XYZ Versions
Vacuum-Compatible Versions
These piezo-driven, flexure-guided Z-stages are completely frictionless and provide very fast response in the millisecond range. Capacitive feedback provides high resolution and nanometer repeatability. PIHera stages can be combined with long-travel motorized stages or with other PIHera piezo flexure X and XY stages.
- Z-Axis Travel to 400 Micron
- Low Profile
- Resolution <1 Nanometer
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Multilayer Piezo Drives
- Direct Metrology with Capacitive Sensors for Highest Precision
- 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
- Vacuum-Compatible Versions
