Low-Profile, Scanning Microscopy XY Piezo Stages with Parallel Metrology
P-542.2CD
Low-Profile, Scanning Microscopy XY Piezo Stages with Parallel Metrology
P-542.2CD
Low Profile for Easy Integration: 16.5 mm
Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision, Decoupling of X-Y-Z Motion
Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
To 200 x 200 Micron Travel Range
Direct Drive Version for High-Speed Positioning & Scanning
80 x 80 mm Clear Aperture
PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
Low Profile for Easy Integration: 16.5 mm
Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision, Decoupling of X-Y-Z Motion
Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
To 200 x 200 Micron Travel Range
Direct Drive Version for High-Speed Positioning & Scanning
80 x 80 mm Clear Aperture
PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
Supplier's Site
Datasheet
Technical Specifications
PI (Physik Instrumente) L.P.
Product Category
Linear Slides and Linear Stages
Product Number
P-542.2CD
Product Name
Low-Profile, Scanning Microscopy XY Piezo Stages with Parallel Metrology
