Ultra-High-Performan
ce Closed-Loop Scanner for AFM/SPM
Compact Manipulation Tool for Nanotechnology
Resonant Frequency 9.8 kHz
Ultra-High-Precision Capacitive Feedback
Parallel-Motion Metrology for Highest Linearity and Stability
50 Picometers Resolution
5 x 5 x 5 Micron Travel Range
Very Small Package
Rugged Design
Ultra-High-Performance Closed-Loop Scanner for AFM/SPM
Compact Manipulation Tool for Nanotechnology
Resonant Frequency 9.8 kHz
Ultra-High-Precision Capacitive Feedback
Parallel-Motion Metrology for Highest Linearity and Stability
