PI (Physik Instrumente) L.P. Rotary Air Bearing Table A-634

Product overview The directly driven low-profile rotation stages of the PIglide RL series are designed for the highest precision with low-profile design. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. The RL stages offer superior travel accuracy, flatness, and wobble performance. Absolute encoder (optional) Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation. Application fields Optical alignment, wafer inspection, wafer alignment, measuring technology, inspection systems, calibration, scanning. Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications. 3-Phase torque motor Brushless Slotless Low cogging torque Accessories and options Incremental or absolute encoder Vacuum feedthrough Self-locking at rest by magnetic preload Clear aperture on request PIglide filter and air preparation kit Single or multi-axis motion controllers and servo drives Multi-axis/customize d setups Base plates made of granite and systems for reducing vibration