Easy servicing: Service-relevant access only on front side, disassembly in less than a minute, low total cost of ownership thanks to fewer wearing parts Flexible: Customizable design to match specific process requirements Reliable: Most widespread abatement technology with a highly efficient fuel gas burner for a wide range of applications
| Pfeiffer Vacuum, Inc. | |
|---|---|
| Product Category | Thermal Oxidizers and Catalytic Oxidizers |
| Product Number | CT-BW |
| Product Name | Burn-wet system |
| Applications | LPCVD / Diffusion; High flow applications; PECVD; Oxyde Etch; ALD |
