CT-BW is a burn-wet system designed for waste gas abatement using a highly efficient fuel gas burner. It features a front-access design for rapid disassembly and low maintenance due to fewer wearing parts. The unit includes standardized connections for nitrogen (7-10 bar), fuel gas (0.25-1.25 bar), oxygen (4-5 bar), sorption medium (<1 bar), fresh water (3-7 bar), cooling water (inlet 4-6 bar, outlet 0-4 bar), and waste water (0-2 bar). Waste gas enters via DN25/40 KF flange at -0.5 to 130 mbar, with clean gas exhaust and cabinet exhaust at DN100 flanges. It operates on 400/208 V, 50/60 Hz, and measures 1300 × 800 × 1930 mm, weighing approximately 600 kg.
Easy servicing: Service-relevant access only on front side, disassembly in less than a minute, low total cost of ownership thanks to fewer wearing parts Flexible: Customizable design to match specific process requirements Reliable: Most widespread abatement technology with a highly efficient fuel gas burner for a wide range of applications
| Pfeiffer Vacuum, Inc. | |
|---|---|
| Product Category | Thermal Oxidizers and Catalytic Oxidizers |
| Product Number | CT-BW |
| Product Name | Burn-wet system |
| Applications | LPCVD / Diffusion; High flow applications; PECVD; Oxyde Etch; ALD |