Newport MKS Motorized XY Linear Stage, Linear Motor, 190 mm Travel ONE-XY200

The ONE-XY200 is an integrated XY linear motor stage designed to eliminate the integration of individual X and Y stages and increase system stiffness for dynamic applications. It features a travel range of 190 mm, with precise orthogonality alignment between the X and Y axes. This stage utilizes robust components such as its iron-less motor drive and cross-roller bearings to deliver high performance, making them ideal solutions for precision industrial applications such as semiconductor wafer inspection, microelectronics test and assembly, metrology, laser microprocessing. For cable management options please contact our applications team. Micron-level Straightness and Flatness Because of the ONE-XY's precision grinding and cross-roller bearings, it achieves micron-level straightness and flatness. Ironless Linear Motor The high efficiency, ironless linear motor has the advantage of higher speed, acceleration and system responsiveness without wear to motor brushes or drive screws, significantly reducing heat generation. Additionally the non-cogging feature of the Ironless Linear Motor ensures excellent speed stability. Not only does the ironless motor provide these advantages, it also results in high-throughput and high reliability. Integrated X and Y Axes The ONE-XY's most distinguishing feature is its 3 plate design, allowing movement in both X and Y direction with a low profile relative to stacked stages. Orthogonality is built into the design, therefore enhancing the XY accuracy.