Newport Corporation High-Energy Excimer Laser Mirrors

Designed for the most demanding UV applications, our high-energy excimer laser mirrors have low loss dielectric coatings to minimize scatter and maximize reflected energy. High reflectivity dielectric coatings High damage threshold Common Excimer wavelengths 0° or 45° incidence angle UV fused silica substrates Features 0° Incidence Angle Coatings We offer excimer mirrors coated for a 0° angle of incidence for KrF (248 nm), XeCl (308 nm), and XeF (351–353 nm) lasers. Reflectivity at 248, 308, and 351–353 nm is greater than 99%. 45° Incidence Angle Coatings We offer excimer mirrors coated for a 45° angle of incidence for KrF (248 nm), XeCl (308 nm), and XeF (351–353 nm) lasers. Reflectivity at 248, 308, and 351–353 nm is greater than 99%.