The 8081M-UHV is a motorized five-axis tilt aligner for ultra-high vacuum environments up to 10^-9 Torr, enabling precise X, Y, Z, θx, and θy adjustments in VUV/EUV applications. It uses Picomotor actuators with minimum incremental motion below 30 nm for X, Y, Z and angular resolution ≤0.7 mrad for θx and θy. Travel is 5 mm for X and 3 mm for Y and Z, with angular ranges of 8° and 10°. It supports a 13 N load and has M6 mounting threads. Operating temperature is 10°C to 40°C; survival range is -40°C to 85°C. Outgassing is less than 5 ppm at 85°C over three hours. It includes a Kapton® ribbon cable and DB15 female connector. Dimensions are 17.00 inches long. Backside mounting includes seven M6 and two M4 threaded holes.
The 8081M-UHV XYZTxTy Motorized Five-Axis Tilt Aligner which increases the utility of our popular kinematic stages by motorizing each of the axes can now be used in UHV environments (10-9 Torr) as well as for VUV/EUV applications. The Picomotor™ actuators to each stage allows the same better than <30 nm remote high-resolution adjustment of various combinations of X, Y, Z, Tx, and Ty. With its minimal backlash, it is excellent for long term stability and high stiffness. The 8081-UHV has been tested and measured to outgas levels less than 5ppm of volatile mass at 85 °C over three hours. Mass Spectrograms detailing the exact outgassing compounds are available upon request. M4 and M6 tapped holes. Use with one 8081-UHV-C cable, two 8725 multi axis adapters and two 8742 controller/drivers to control all 5 axes.
| Newport MKS | |
|---|---|
| Product Category | Linear Slides and Linear Stages |
| Product Number | 8081M-UHV |
| Product Name | Motorized XYZθxθy Tilt Aligner, Ultra High Vacuum, M6 |
| Axis Configuration | X-Y-Z Axes |
