Additional Properties
Hydrolytic Sensitivity 3: reacts with aqueous base Application Single source precursor for beta-SiC by LPCVD at 800-1,000°.1 Reference 1. Lienhard, M. et al. in “Chemical Aspects of Electronic Ceramics Processing” Arkles, B. ed., MRS Proc. 1998, 495, 139. Safety
Packaging Under Nitrogen Volatile Carbosilane Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures. 1,3,5-Trisilacyclohe
xane; Cyclotrisilmethylene
; Cyclotrimethylenetri
silane
Single source precursor for β-SiC by LPCVD at 800-1,000 °C
Gelest, Inc.
Done
Datasheet
Description
Additional Properties
Hydrolytic Sensitivity 3: reacts with aqueous base Application Single source precursor for beta-SiC by LPCVD at 800-1,000°.1 Reference 1. Lienhard, M. et al. in “Chemical Aspects of Electronic Ceramics Processing” Arkles, B. ed., MRS Proc. 1998, 495, 139. Safety
Packaging Under Nitrogen Volatile Carbosilane Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures. 1,3,5-Trisilacyclohe
xane; Cyclotrisilmethylene
; Cyclotrimethylenetri
silane
Single source precursor for β-SiC by LPCVD at 800-1,000 °C
Additional Properties
Hydrolytic Sensitivity 3: reacts with aqueous base Application Single source precursor for beta-SiC by LPCVD at 800-1,000°.1 Reference 1. Lienhard, M. et al. in “Chemical Aspects of Electronic Ceramics Processing” Arkles, B. ed., MRS Proc. 1998, 495, 139. Safety
Packaging Under Nitrogen Volatile Carbosilane Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures. 1,3,5-Trisilacyclohe
xane; Cyclotrisilmethylene
; Cyclotrimethylenetri
silane
Single source precursor for β-SiC by LPCVD at 800-1,000 °C
Additional Properties
Hydrolytic Sensitivity 3: reacts with aqueous base
Application
Single source precursor for beta-SiC by LPCVD at 800-1,000°.1
Reference
1. Lienhard, M. et al. in “Chemical Aspects of Electronic Ceramics Processing” Arkles, B. ed., MRS Proc. 1998, 495, 139.
Safety
Packaging Under Nitrogen
Volatile Carbosilane
Carbosilanes are compounds in which the elements of silicon and carbon alternate in a molecular framework or polymeric backbone in an approximate ratio of 1:1. By appropriate selection of the carbosilane precursor and deposition conditions the silicon carbide framework can be shifted toward substituted silicon and diamond-like structures.
1,3,5-Trisilacyclohexane; Cyclotrisilmethylene; Cyclotrimethylenetrisilane
Single source precursor for β-SiC by LPCVD at 800-1,000 °C
