Additional Properties
Hydrolytic Sensitivity 7: reacts slowly with moisture/water Application Forms conformal hydrophobic films on Al2O3 by ALD.1 Reference 1. Herrmann, C. et al. J. Micromech. Microeng. 2005, 15, 1. Safety
Packaging Under Nitrogen
Gelest, Inc.
Done
Datasheet
Description
Additional Properties
Hydrolytic Sensitivity 7: reacts slowly with moisture/water Application Forms conformal hydrophobic films on Al2O3 by ALD.1 Reference 1. Herrmann, C. et al. J. Micromech. Microeng. 2005, 15, 1. Safety
Packaging Under Nitrogen
Additional Properties
Hydrolytic Sensitivity 7: reacts slowly with moisture/water Application Forms conformal hydrophobic films on Al2O3 by ALD.1 Reference 1. Herrmann, C. et al. J. Micromech. Microeng. 2005, 15, 1. Safety
Packaging Under Nitrogen
Additional Properties
Hydrolytic Sensitivity 7: reacts slowly with moisture/water
Application
Forms conformal hydrophobic films on Al2O3 by ALD.1
Reference
1. Herrmann, C. et al. J. Micromech. Microeng. 2005, 15, 1.
Safety