Nikon Metrology Fully Automated Sputter Coater JEOL Smart Coater

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Fully Automated Sputter Coater - JEOL Smart Coater - Nikon Metrology
Leuven, Belgium
Fully Automated Sputter Coater JEOL Smart Coater
Thin film conductive coatings are effective in eliminating charging with non-conductive materials or enhancing secondary electron emission. JEOL’s Smart Coater is a fully automated sputter coater that applies a fine grained gold or platinum (option) coating on samples for imaging in a scanning electron microscope. This coater uses a low voltage discharge technique with a magnetron electrode for high efficiency, cold sputtering. Low voltage sputtering, as well as having the sample isolated from the electrode, minimizes sample damage. JEOL’s Smart Coater is simple to use with fully automated vacuum and sputtering. Insert your samples, turn the unit on and select the sputtering time. The chamber will evacuate and sputtering will begin automatically. When the unit is powered down, it vents to atmosphere. Thickness of the coating is influenced by distance from target, distance from center of the stage as well as sputtering time. As a reference, listed below are basic coating conditions and resulting film thicknesses.
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Technical Specifications

  Nikon Metrology
Product Category Thin Film Equipment
Product Number JEOL Smart Coater
Product Name Fully Automated Sputter Coater
Materials Processed Metal
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