Pitch: 700 nm
Surface feature: Hardened photoresist ridges covered with Tungsten
Substrate: Silicon (3 x 4mm.
Line height: approximately 30 nm (not calibrated).
Line width: Approximately 130 nm (not calibrated).)
Mounting: Unmounted
| Matexcel | |
|---|---|
| Product Category | Microscopy and Metallography Sample Preparation Equipment |
| Product Number | ASS-850 |
| Product Name | Microscopy Reference Standard 850 |