High-accuracy, reflective Laserscale with signal wavelength of 250nm Ideal for low-profile stages, semiconductor back-end processing equipment and precision microscopes
Signal wavelength : 250nm
High accuracy : ±1μm/420nm
High response speed : 700mm/s
Maximum resolution : 0.03125nm
Available : with/without reference point
Completely non-contact design Return error is theoretically eliminated.
Scale : Blue plate glass/Low expansion glass
Thin head with thickness of 12mm
Supporting various resolutions and output modes(Depending on the interpolator connected.)
Special non-magnetic and vacuum-compatible models available
High-accuracy, reflective Laserscale with signal wavelength of 250nm Ideal for low-profile stages, semiconductor back-end processing equipment and precision microscopes
- Signal wavelength : 250nm
- High accuracy : ±1μm/420nm
- High response speed : 700mm/s
- Maximum resolution : 0.03125nm
- Available : with/without reference point
- Completely non-contact design Return error is theoretically eliminated.
- Scale : Blue plate glass/Low expansion glass
- Thin head with thickness of 12mm
- Supporting various resolutions and output modes(Depending on the interpolator connected.)
- Special non-magnetic and vacuum-compatible models available
