Axetris AG Mass Flow Controller MFC2022-A

MFC 21x2 is a standalone mass flow controller including an additional high precision PID controller together with a fast acting solenoid valve. Digital and/or analog input / output enable direct, fast and accurate control of the gas flow. The additional valve override functionality allows an immediate setting of the gas flow to the fully open or closed position or any value in-between. Compared to conventional mass flow controllers it offers a smaller size, higher accuracy, a faster response time, along with multi-range and multi-gas capability