Kistler Group Triaxial MEMS Capacitive Accelerometer 8396A

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Triaxial MEMS Capacitive Accelerometer - 8396A - Kistler Group
Novi, MI, United States
Triaxial MEMS Capacitive Accelerometer 8396A
Type 8396A... triaxial capacitive accelerometer family utilizes a silicon Micro-Electro-Mechan ical System (MEMS) variable capacitance sensing element. The sensing element of each axis consists of a very small inertial mass and a flexure element cantilever positioned between two plates. As the mass deflects under acceleration, the capacitance between these plates changes. AC excitation and synchronous amplitude demodulation circuitry contained in the accelerometer's internal signal conditioner provides an analog output signal proportional to the applied acceleration. This output signal is scaled as a voltage which is proportional to the applied acceleration. The output signal format is available as bipolar 0±4 V, single ended 2.5±2 V and 0±4 V or 0±8 V differential. The accelerometer is powered by a single regulated supply between 6 and 50 VDC. Temperature output is provided if external compensation of the output signal is desired. The sensing element and electronics are contained in a lightweight, welded titanium housing with either a circular 9 pin connector or an integral cable* terminated by pigtails or 9 pin D-Sub connector. Ground isolation is obtained by mounting the sensor using one of the off-ground accessories or by adhesively mounting the sensor to the test object using the side of the sensor with the integral hard anodized plate.

Type 8396A... triaxial capacitive accelerometer family utilizes a silicon Micro-Electro-Mechanical System (MEMS) variable capacitance sensing element. The sensing element of each axis consists of a very small inertial mass and a flexure element cantilever positioned between two plates. As the mass deflects under acceleration, the capacitance between these plates changes. AC excitation and synchronous amplitude demodulation circuitry contained in the accelerometer's internal signal conditioner provides an analog output signal proportional to the applied acceleration. This output signal is scaled as a voltage which is proportional to the applied acceleration.

The output signal format is available as bipolar 0±4 V, single ended 2.5±2 V and 0±4 V or 0±8 V differential. The accelerometer is powered by a single regulated supply between 6 and 50 VDC. Temperature output is provided if external compensation of the output signal is desired. The sensing element and electronics are contained in a lightweight, welded titanium housing with either a circular 9 pin connector or an integral cable* terminated by pigtails or 9 pin D-Sub connector. Ground isolation is obtained by mounting the sensor using one of the off-ground accessories or by adhesively mounting the sensor to the test object using the side of the sensor with the integral hard anodized plate.

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Technical Specifications

  Kistler Group
Product Category Accelerometers
Product Number 8396A
Product Name Triaxial MEMS Capacitive Accelerometer
Frequency Range 0.0 to 7000 Hz
Sensor Technology Capacitance; MEMS
Sensor Outputs Acceleration
Operating Temperature -67 to 257 F (-55 to 125 C)
Device Category Sensor / Transducer
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