Alignment Stages (SA) combine a linear motion rolling guide, crossed roller bearing and direct drive linear motor to create a compact, low profile XYθ positioning table. The X-table for linear motion is combined with the θ-table for rotary positioning in the basic configuration. Other designs can be easily specified including stage to achieve XY or XYθ motion. A coreless linear motor, miniature linear way and crossed roller bearing combine to achieve an extremely low profile when compared to ball screw-driven stages.
Extremely high resolution and accuracy are achieved using closed loop control and a high resolution linear encoder.
Five sizes are available with various sectional shapes.
Applications include semiconductor and liquid crystal manufacturing equipment and positioning mechanisms for measuring and inspection instruments. ous sectional shapes. Applications include semiconductor and liquid crystal manufacturing equipment and positioning mechanisms for measuring and inspection instruments.
Alignment Stages (SA) combine a linear motion rolling guide, crossed roller bearing and direct drive linear motor to create a compact, low profile XYθ positioning table. The X-table for linear motion is combined with the θ-table for rotary positioning in the basic configuration. Other designs can be easily specified including stage to achieve XY or XYθ motion. A coreless linear motor, miniature linear way and crossed roller bearing combine to achieve an extremely low profile when compared to ball screw-driven stages.
- Extremely high resolution and accuracy are achieved using closed loop control and a high resolution linear encoder.
- Five sizes are available with various sectional shapes.
- Applications include semiconductor and liquid crystal manufacturing equipment and positioning mechanisms for measuring and inspection instruments. ous sectional shapes. Applications include semiconductor and liquid crystal manufacturing equipment and positioning mechanisms for measuring and inspection instruments.
